JPH0516089B2 - - Google Patents

Info

Publication number

JPH0516089B2

JPH0516089B2 JP18772483A JP18772483A JPH0516089B2 JP H0516089 B2 JPH0516089 B2 JP H0516089B2 JP 18772483 A JP18772483 A JP 18772483A JP 18772483 A JP18772483 A JP 18772483A JP H0516089 B2 JPH0516089 B2 JP H0516089B2

Authority

JP

Japan

Prior art keywords

recording medium

magnetic recording

magnetic

thin film

metal thin

Prior art date

1983-10-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 230000005291 magnetic effect Effects 0.000 claims description 64
• 229910052751 metal Inorganic materials 0.000 claims description 28
• 239000002184 metal Substances 0.000 claims description 28
• 230000005294 ferromagnetic effect Effects 0.000 claims description 21
• 239000010409 thin film Substances 0.000 claims description 20
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 230000001678 irradiating effect Effects 0.000 claims description 2
• 238000000034 method Methods 0.000 description 17
• 239000010408 film Substances 0.000 description 9
• 238000010438 heat treatment Methods 0.000 description 8
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
• 229910045601 alloy Inorganic materials 0.000 description 4
• 239000000956 alloy Substances 0.000 description 4
• 238000000151 deposition Methods 0.000 description 4
• 239000000696 magnetic material Substances 0.000 description 4
• -1 polyethylene terephthalate Polymers 0.000 description 4
• 238000004544 sputter deposition Methods 0.000 description 4
• 238000001771 vacuum deposition Methods 0.000 description 4
• 238000007740 vapor deposition Methods 0.000 description 4
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
• 229910052786 argon Inorganic materials 0.000 description 3
• 239000010941 cobalt Substances 0.000 description 3
• 229910017052 cobalt Inorganic materials 0.000 description 3
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
• 230000008021 deposition Effects 0.000 description 3
• 238000001845 vibrational spectrum Methods 0.000 description 3
• 238000010586 diagram Methods 0.000 description 2
• 238000001704 evaporation Methods 0.000 description 2
• 230000008020 evaporation Effects 0.000 description 2
• 238000007733 ion plating Methods 0.000 description 2
• 229920000139 polyethylene terephthalate Polymers 0.000 description 2
• 239000005020 polyethylene terephthalate Substances 0.000 description 2
• 229920002635 polyurethane Polymers 0.000 description 2
• 229920005749 polyurethane resin Polymers 0.000 description 2
• 239000000126 substance Substances 0.000 description 2
• 238000000427 thin-film deposition Methods 0.000 description 2
• 238000004804 winding Methods 0.000 description 2
• 229910000521 B alloy Inorganic materials 0.000 description 1
• 229920001747 Cellulose diacetate Polymers 0.000 description 1
• 229920002284 Cellulose triacetate Polymers 0.000 description 1
• 229910020630 Co Ni Inorganic materials 0.000 description 1
• 229910002440 Co–Ni Inorganic materials 0.000 description 1
• 229910017061 Fe Co Inorganic materials 0.000 description 1
• GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
• 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
• 239000004642 Polyimide Substances 0.000 description 1
• 239000004743 Polypropylene Substances 0.000 description 1
• NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
• 238000010521 absorption reaction Methods 0.000 description 1
• 229910052787 antimony Inorganic materials 0.000 description 1
• WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 239000010953 base metal Substances 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 229910052797 bismuth Inorganic materials 0.000 description 1
• JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
• 239000006229 carbon black Substances 0.000 description 1
• 229920002678 cellulose Polymers 0.000 description 1
• 239000001913 cellulose Substances 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 230000006378 damage Effects 0.000 description 1
• 238000010894 electron beam technology Methods 0.000 description 1
• 239000003302 ferromagnetic material Substances 0.000 description 1
• 229910052733 gallium Inorganic materials 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 229910052732 germanium Inorganic materials 0.000 description 1
• GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
• 239000011261 inert gas Substances 0.000 description 1
• 229910052742 iron Inorganic materials 0.000 description 1
• 230000001788 irregular Effects 0.000 description 1
• 238000004898 kneading Methods 0.000 description 1
• 238000001755 magnetron sputter deposition Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 239000007769 metal material Substances 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000003973 paint Substances 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000728 polyester Polymers 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 229920000098 polyolefin Polymers 0.000 description 1
• 229920001155 polypropylene Polymers 0.000 description 1
• 239000004800 polyvinyl chloride Substances 0.000 description 1
• 229920000915 polyvinyl chloride Polymers 0.000 description 1
• 238000003825 pressing Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• 230000005855 radiation Effects 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 229910052716 thallium Inorganic materials 0.000 description 1
• BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
• 230000003685 thermal hair damage Effects 0.000 description 1